MEMS reliability for critical applications :
20 September 2000, Santa Clara, USA /
Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).

Description

Related Names

Lawton, Russell A.
Sandia National Laboratories.
Solid State Technology (Organization)
Semiconductor Equipment and Materials International.
Society of Photo-optical Instrumentation Engineers.

Language(s)

English

Published

Bellingham, Wash., USA : SPIE, c2000.

Subjects

Microelectromechanical systems > Microelectromechanical systems / Reliability > Microelectromechanical systems / Reliability / Congresses.

Physical Description

v, 146 p. : ill. ; 28 cm.

ISBN

0819438367

Locate a Print Version

Find in a library

Viewability