Micromachining technology for micro-optics /
sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).

Description

New Title

Micromachining technology for micro-optics and nano-optics

Related Names

Sandia National Laboratories.
Solid State Technology (Organization)
Semiconductor Equipment and Materials International.
Society of Photo-optical Instrumentation Engineers.

Language(s)

English

Published

Bellingham, Wash., USA : SPIE.

Subjects

Microelectromechanical systems > Microelectromechanical systems / Congresses.
Miniature electronic equipment > Miniature electronic equipment / Industrial applications > Miniature electronic equipment / Industrial applications / Congresses.
Optoelectronic devices > Optoelectronic devices / Industrial applications > Optoelectronic devices / Industrial applications / Congresses.
Integrated optics > Integrated optics / Congresses.

Note

Also issued online.

Physical Description

v. : ill. ; 28 cm.

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