Micromachining technology for micro-optics and nano-optics /
sponsored ... by SPIE--the International Society for Optical Engineering.

Description

Previous Title: Micromachining technology for micro-optics
Related Names: Sandia National Laboratories.
Solid State Technology (Organization)
Semiconductor Equipment and Materials International.
Society of Photo-optical Instrumentation Engineers.
Language(s): English
Published: Bellingham, Wash., USA : SPIE, c2003-
Subjects: Nanotechnology > Nanotechnology / Congresses.
Microelectromechanical systems > Microelectromechanical systems / Congresses.
Micromachining > Micromachining / Congresses.
Optoelectronic devices > Optoelectronic devices / Design and construction > Optoelectronic devices / Design and construction / Congresses.
Miniature electronic equipment > Miniature electronic equipment / Design and construction > Miniature electronic equipment / Design and construction / Congresses.
Integrated optics > Integrated optics / Congresses.
Note: Latest issue consulted: 2 (27-29 Jan. 2004).
Also issued online.
Physical Description: v. : ill. ; 28 cm.
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