In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing.

Description

Related Names

American Vacuum Society.
Electrochemical Society.
Solid State Technology (Organization)
Semiconductor Equipment and Materials International.
Society of Photo-Optical Instrumentation Engineers.

Language(s)

English

Published

Bellingham, Wash. : SPIE, c1997-

Subjects

Manufacturing processes > Manufacturing processes / Congresses.
Optical pattern recognition > Optical pattern recognition / Congresses.
Semiconductors > Semiconductors / Design and construction > Semiconductors / Design and construction / Congresses.
Integrated circuits > Integrated circuits / Design and construction > Integrated circuits / Design and construction / Congresses.

Note

Co-sponsored by Semiconductor Equipment and Materials International, Solid State Technology, and the Electrochemical Society, 1997; also by American Vacuum Society, 1998-

Physical Description

v. : ill. ; 28 cm.

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