MEMS reliability for critical applications :
20 September 2000, Santa Clara, USA /
Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
APA Citation
Lawton, R. A., Sandia National Laboratories., Solid State Technology (Organization)., Semiconductor Equipment and Materials International., Society of Photo-Optical Instrumentation Engineers. (2000). MEMS reliability for critical applications: 20 September 2000, Santa Clara, USA. Bellingham, Wash., USA: SPIE.
MLA Citation
Society of Photo-Optical Instrumentation Engineers, et al.. MEMS Reliability for Critical Applications: 20 September 2000, Santa Clara, USA. Bellingham, Wash., USA: SPIE, 2000.
Warning: These citations may not always be complete (especially for serials).