MEMS reliability for critical and space applications :
21-22 September, 1999, Santa Clara, California /
Russell A. Lawton [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology [and others].

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Related Names
Lawton, Russell A.
Solid State Technology (Organization)
Society of Photo-Optical Instrumentation Engineers.
Language(s)
English
Published
Bellingham, Washington : SPIE, c1999.
Subjects
Microelectromechanical systems > Congresses.
Physical Description
vi, 176 p. : ill. ; 28 cm.
ISBN
0819434779
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