| LDR | 02116nam a2200361 a 4500 | ||
| 001 | 003516715 | ||
| 003 | MiAaHDL | ||
| 005 | 20250113000000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 001218s2000 waua b 101 0 eng d | ||
| 020 | ⊔ | ⊔ | ‡a0819438367 |
| 035 | ⊔ | ⊔ | ‡a(MiU)990035167150106381 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990035167150106381 |
| 035 | ⊔ | ⊔ | ‡z(MiU)MIU01000000000000003516715-goog |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)45410860 |
| 035 | ⊔ | ⊔ | ‡z(MiU)Aleph003516715 |
| 040 | ⊔ | ⊔ | ‡aCUS ‡cCUS ‡dEYM ‡dUtOrBLW |
| 090 | ⊔ | ⊔ | ‡aTK7875 ‡b.M442 2000 |
| 245 | 0 | 0 | ‡aMEMS reliability for critical applications : ‡b20 September 2000, Santa Clara, USA / ‡cRussell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA). |
| 246 | 3 | ⊔ | ‡aMicroelectromechanical systems reliability for critical applications |
| 260 | ⊔ | ⊔ | ‡aBellingham, Wash., USA : ‡bSPIE, ‡cc2000. |
| 300 | ⊔ | ⊔ | ‡av, 146 p. : ‡bill. ; ‡c28 cm. |
| 336 | ⊔ | ⊔ | ‡atext ‡btxt ‡2rdacontent |
| 337 | ⊔ | ⊔ | ‡aunmediated ‡bn ‡2rdamedia |
| 338 | ⊔ | ⊔ | ‡avolume ‡bnc ‡2rdacarrier |
| 490 | 0 | ⊔ | ‡aSPIE proceedings series ; ‡vv. 4180 |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references and index. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 0 | ‡aMicroelectromechanical systems ‡xReliability ‡vCongresses. |
| 700 | 1 | ⊔ | ‡aLawton, Russell A. |
| 710 | 2 | ⊔ | ‡aSandia National Laboratories. ‡0http://id.loc.gov/authorities/names/n80115974 ‡1http://id.loc.gov/rwo/agents/n80115974 |
| 710 | 2 | ⊔ | ‡aSolid State Technology (Organization) ‡0http://id.loc.gov/authorities/names/n98059169 ‡1http://id.loc.gov/rwo/agents/n98059169 |
| 710 | 2 | ⊔ | ‡aSemiconductor Equipment and Materials International. ‡0http://id.loc.gov/authorities/names/n90682619 ‡1http://id.loc.gov/rwo/agents/n90682619 |
| 710 | 2 | ⊔ | ‡aSociety of Photo-Optical Instrumentation Engineers. ‡0http://id.loc.gov/authorities/names/n78088934 ‡1http://id.loc.gov/rwo/agents/n78088934 |
| 899 | ⊔ | ⊔ | ‡a39015050329922 |
| CID | ⊔ | ⊔ | ‡a003516715 |
| DAT | 0 | ⊔ | ‡a20241218082446.0 ‡b20250113000000.0 |
| DAT | 1 | ⊔ | ‡a20250113180452.0 ‡b2025-01-14T15:09:24Z |
| DAT | 2 | ⊔ | ‡a2023-08-14T17:30:02Z |
| CAT | ⊔ | ⊔ | ‡aSDR-MIU ‡cmiu ‡dALMA ‡lprepare.pl-004-009 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-miu.990035167150106381 ‡aMiU ‡bSDR ‡cMIU ‡f003516715 ‡pmdp.39015050329922 ‡sMIU ‡1990035167150106381 |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cMIU ‡d20250114 ‡sgoogle ‡umdp.39015050329922 ‡y2000 ‡ric ‡qbib ‡tUS bib date1 >= 1930 |