Modern optical characterization techniques for semiconductors and semiconductor devices :
26-27 March 1987, Bay Point, Florida /
O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Description
- Language(s)
-
English
- Published
-
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987.
- Physical Description
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vi, 282 p. :
ill. ;
28 cm.
- ISBN
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089252829X
Viewability