Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida

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245 0 0 ‡aModern optical characterization techniques for semiconductors and semiconductor devices : ‡b26-27 March 1987, Bay Point, Florida / ‡cO.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
260 ⊔ ⊔ ‡aBellingham, Wash., USA : ‡bSPIE--the International Society for Optical Engineering, ‡cc1987.
300 ⊔ ⊔ ‡avi, 282 p. : ‡bill. ; ‡c28 cm.
490 0 ⊔ ‡aProceedings of SPIE--the International Society for Optical Engineering ; ‡vv. 794
504 ⊔ ⊔ ‡aIncludes bibliographies and index.
538 ⊔ ⊔ ‡aMode of access: Internet.
650 ⊔ 0 ‡aSemiconductors ‡xOptical properties ‡xCongresses.
650 ⊔ 0 ‡aSemiconductors ‡xTesting ‡xOptical methods ‡xCongresses.
700 1 ⊔ ‡aSong, J. J.
700 1 ⊔ ‡aPollak, Fred H.
700 1 ⊔ ‡aGlembocki, O. J.
710 2 ⊔ ‡aMetallurgical Society (U.S.)
710 2 ⊔ ‡aSociety of Photo-optical Instrumentation Engineers.
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DAT 1 ⊔ ‡a20210919140713.0 ‡b2022-11-27T18:36:51Z
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