Diagnostic techniques for semiconductor materials processing :
Symposium held November 29-December 2, 1993, Boston, Massachusetts, USA /
editors, O.J. Glembocki ... [et al.]

Description

Tools

Cite this Export citation file
Related Names
Glembocki, O. J
Materials Research Society. Meeting
Language(s)
English
Published
Pittsburgh, PA : Materials Research Society, 1994
Subjects
Semiconductors > Testing > Congresses
Physical Description
xv, 505 p. : ill. ; 24 cm
ISBN
1558992235
Locate a Print Version
Find in a library

Viewability

Item Link Original Source
Limited (search only)   University of California