Spectroscopic characterization techniques for semiconductor technology III :
14-15 March 1988, Newport Beach, California /
Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society
Description
- Language(s)
-
English
- Published
-
Bellingham, Wash., U.S.A. : The Society, c1988
- Physical Description
-
viii, 234 p. :
ill. ;
28 cm
- ISBN
-
0892529814
Viewability