Spreading resistance analysis for silicon layers with nonuniform resistivity /
David H. Dickey, Solecon Laboratories, and James R. Ehrstein, Electron Devices Division, Center for Electronics & Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.

Description

Main Author

Dickey, David H.

Related Names

Ehrstein, James R., joint author.
United States. Defense Advanced Research Projects Agency.
Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
Solecon Laboratories.

Language(s)

English

Published

Washington : Dept. of Commerce, [Office of Science and Technology], National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1979.

Subjects

Silicon > Silicon / Electric properties.
Electric resistance, Spreading.
Semiconductors > Semiconductors / Testing.

Physical Description

vi, 65 p. : ill. ; 26 cm.

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