Spreading resistance analysis for silicon layers with nonuniform resistivity

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035 ‡a(OCoLC)4856570
100 1 0 ‡aDickey, David H.
245 1 0 ‡aSpreading resistance analysis for silicon layers with nonuniform resistivity / ‡cDavid H. Dickey, Solecon Laboratories, and James R. Ehrstein, Electron Devices Division, Center for Electronics & Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
260 0 ‡aWashington : ‡bDept. of Commerce, [Office of Science and Technology], National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., ‡c1979.
265 ‡a20402.
300 ‡avi, 65 p. : ‡bill. ; ‡c26 cm.
490 0 ‡aSemiconductor measurement technology.
490 0 ‡aNBS special publication ; 400-48.
538 ‡aMode of access: Internet.
650 0 ‡aSilicon ‡xElectric properties.
650 0 ‡aElectric resistance, Spreading.
650 0 ‡aSemiconductors ‡xTesting.
700 1 0 ‡aEhrstein, James R. ‡ejoint author.
710 1 0 ‡aUnited States. ‡bDefense Advanced Research Projects Agency.
710 2 0 ‡aCenter for Electronics and Electrical Engineering (U.S.). ‡bElectron Devices Division.
710 2 0 ‡aSolecon Laboratories.
CID ‡a006865785
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DAT 2 ‡a2024-04-21T17:30:02Z ‡b2021-09-12T21:30:02Z
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