Spreading resistance analysis for silicon layers with nonuniform resistivity /
David H. Dickey and James R. Ehrstein.

Description

Main Author

Dickey, David H.

Related Names

Ehrstein, James R.
United States. National Bureau of Standards.

Language(s)

English

Published

Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1979.

Subjects

Silicon > Silicon / Electric properties.
Electric resistance, Spreading.
Semiconductors > Semiconductors / Testing.

Note

"Issued May 1979."
"This activity was supported by the Defense Advanced Research Projects Agency."

Physical Description

vi, 65 p. : ill. ; 26 cm.

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