Microfluidics and bioMEMS /
sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].

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Microfluidics, bioMEMS, and medical microsystems
Related Names
Semiconductor Equipment and Materials International.
Society of Photo-Optical Instrumentation Engineers.
Language(s)
English
Published
Bellingham, Washington : SPIE
Subjects
Micromechanics > Congresses.
Fluidic devices > Congresses.
Note
Also issued online.
Physical Description
v. : ill. ; 28 cm.
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Limited (search only)   2001 University of Michigan