Optical microlithography IX :
13-15 March, 1996, Santa Clara, California /
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.

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Related Names
Fuller, Gene E.
SEMATECH (Organization)
Semiconductor Equipment and Materials International.
Society of Photo-optical Instrumentation Engineers.
Language(s)
English
Published
Bellingham, Wash., USA : SPIE, c1996.
Subjects
Integrated circuits > Very large scale integration > Congresses.
Microlithography > Congresses.
Physical Description
xii, 914 p. : ill. ; 28 cm.
ISBN
0819421022
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