Microfluidics and bioMEMS

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245 0 0 ‡aMicrofluidics and bioMEMS / ‡csponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
260 ‡aBellingham, Washington : ‡bSPIE
300 ‡av. : ‡bill. ; ‡c28 cm.
336 ‡atext ‡btxt ‡2rdacontent
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362 1 ‡aBegan with 22-24 Oct. 2001?
490 0 ‡aSPIE proceedings series
530 ‡aAlso issued online.
538 ‡aMode of access: Internet.
580 ‡aElectronic serial mode of access: World Wide Web via SPIE Digital Library.
650 0 ‡aMicromechanics ‡vCongresses. ‡0http://id.loc.gov/authorities/subjects/sh2008107600
650 0 ‡aFluidic devices ‡vCongresses. ‡0http://id.loc.gov/authorities/subjects/sh2009124424
710 2 ‡aSemiconductor Equipment and Materials International. ‡0http://id.loc.gov/authorities/names/n90682619 ‡1http://id.loc.gov/rwo/agents/n90682619
710 2 ‡aSociety of Photo-Optical Instrumentation Engineers. ‡0http://id.loc.gov/authorities/names/n78088934 ‡1http://id.loc.gov/rwo/agents/n78088934
730 0 ‡aSPIE digital library. ‡0http://id.loc.gov/authorities/names/no2006030688 ‡1http://id.loc.gov/rwo/agents/no2006030688 ‡1http://viaf.org/viaf/181712398
740 0 ‡aMicrofluidics and bioMEMS (Online)
785 0 0 ‡tMicrofluidics, bioMEMS, and medical microsystems
899 ‡a39015053518620 ‡c2001
CID ‡a003590383
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DAT 2 ‡a2023-11-03T17:30:02Z
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