Microelectronic manufacturing yield, reliability, and failure analysis /
sponsored and published by SPIE--the International Society for Optical Engineering.

Description

Related Names

Semiconductor Equipment and Materials International.
Society of Photo-optical Instrumentation Engineers.

Language(s)

English

Published

Bellingham, Wash., USA : SPIE, c1995-

Subjects

Integrated circuits > Integrated circuits / Very large scale integration > Integrated circuits / Very large scale integration / Congresses.
Microelectronics > Microelectronics / Congresses.

Note

Cooperating organizations: SEMI--Semiconductor Equipment and Materials International, and other similar bodies.

Physical Description

v. : ill. ; 28 cm.

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