Journal of vacuum science & technology.
B,
Microelectronics and nanometer structures :
processing, measurement, and phenomena : an official journal of the American Vacuum Society

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Previous Title
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Related Names
American Vacuum Society
Language(s)
English
Published
New York : Published for the Society by the American Institute of Physics, c1991-
Subjects
Nanoparticles > Measurement > Periodicals
Microelectronics > Periodicals
Vacuum microelectronics > Periodicals
Physical Description
v. : ill. ; 29 cm
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