Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

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245 0 0 ‡aSpectroscopic characterization techniques for semiconductor technology III : ‡b14-15 March 1988, Newport Beach, California / ‡cOrest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society
260 ‡aBellingham, Wash., U.S.A. : ‡bThe Society, ‡cc1988
300 ‡aviii, 234 p. : ‡bill. ; ‡c28 cm
490 0 ‡aProceedings of SPIE--the International Society for Optical Engineering ; ‡vv. 946
538 ‡aMode of access: Internet.
650 0 ‡aSpectrum analysis ‡vCongresses
650 0 ‡aSemiconductors ‡xTesting ‡vCongresses
700 1 ‡aPonce, Fernando A
700 1 ‡aPollak, Fred H
700 1 ‡aGlembocki, O. J
710 2 ‡aMetallurgical Society (U.S.)
710 2 ‡aSociety of Photo-optical Instrumentation Engineers
710 2 ‡aOptical Society of America
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