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‡aSpectroscopic characterization techniques for semiconductor technology III :
‡b14-15 March 1988, Newport Beach, California /
‡cOrest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society
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‡aBellingham, Wash., U.S.A. :
‡bThe Society,
‡cc1988
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‡c28 cm
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‡aMetallurgical Society (U.S.)
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‡aSociety of Photo-optical Instrumentation Engineers
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‡aOptical Society of America
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