Catalog Record: Notes on SEM examination of microelectronic devices | HathiTrust Digital Library

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Notes on SEM examination of microelectronic devices /
John R. Devaney, K.O. Leedy, and W.J. Keery.


Main Author: Devaney, John R.
Related Names: Keery, W. J. , joint author., Leedy, Kathryn O. , joint author.
Language(s): English
Published: Washington : U.S. Dept. of Commerce, National Bureau of Standards : 1977.
Subjects: Microscopie électronique à balayage > Microscopie électronique à balayage / Technique.
Semiconducteurs > Semiconducteurs / Essais.
Équipement électronique miniaturisé > Équipement électronique miniaturisé / Essais.
Scanning electron microscopy.
Semiconductors > Semiconductors / Testing.
Miniature electronic equipment > Miniature electronic equipment / Testing.
Physical Description: iv, 48 p. : ill. ; 26 cm.
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