Notes on SEM examination of microelectronic devices /
John R. Devaney, K.O. Leedy, and W.J. Keery.

APA Citation

Devaney, J. R., Keery, W. J.., Leedy, K. O.. (1977). Notes on SEM examination of microelectronic devices. Washington: U.S. Dept. of Commerce, National Bureau of Standards .

MLA Citation

Devaney, John R, W. J. Keery, and Kathryn O. Leedy. Notes On SEM Examination of Microelectronic Devices. Washington: U.S. Dept. of Commerce, National Bureau of Standards , 1977.

Warning: These citations may not always be complete (especially for serials).