Notes on SEM examination of microelectronic devices

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100 1 ⊔ ‡aDevaney, John R.
245 1 0 ‡aNotes on SEM examination of microelectronic devices / ‡cJohn R. Devaney, K.O. Leedy, and W.J. Keery.
260 ⊔ ⊔ ‡aWashington : ‡bU.S. Dept. of Commerce, National Bureau of Standards : ‡bFor sale by the Supt. of Doc., U.S. Govt. Print. Off., ‡c1977.
300 ⊔ ⊔ ‡aiv, 48 p. : ‡bill. ; ‡c26 cm.
490 ⊔ 0 ‡aSemiconductor measurement technology
490 0 ⊔ ‡aNBS special publication ; 400-35
504 ⊔ ⊔ ‡aIncludes bibliographical references.
538 ⊔ ⊔ ‡aMode of access: Internet.
650 ⊔ 7 ‡aMicroscopie électronique à balayage ‡xTechnique. ‡2ram
650 ⊔ 7 ‡aSemiconducteurs ‡xEssais. ‡2ram
650 ⊔ 7 ‡aÉquipement électronique miniaturisé ‡xEssais. ‡2ram
650 ⊔ 0 ‡aScanning electron microscopy.
650 ⊔ 0 ‡aSemiconductors ‡xTesting.
650 ⊔ 0 ‡aMiniature electronic equipment ‡xTesting.
700 1 ⊔ ‡aKeery, W. J., ‡ejoint author.
700 1 ⊔ ‡aLeedy, Kathryn O., ‡ejoint author.
776 0 8 ‡iOnline version: ‡aDevaney, John R. ‡tNotes on SEM examination of microelectronic devices. ‡dWashington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Doc., U.S. Govt. Print. Off., 1977 ‡w(OCoLC)631288854
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