The basics of ion implantation :
technology, equipment, and process /
edited by M.I. Current.

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Related Names
Current, Michael I.
Language(s)
English
Published
Austin, TX : Ion Beam Press, 1997.
Edition
1st ed.
Subjects
Ion implantation.
Note
Subtitle on cover: Process, equipment, and technology.
Physical Description
1 v. (various pagings) : ill. ; 28 cm.
ISBN
1889381020
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