Investigation of the chemical and electrochemical phenomena in the chemical mechanical planarization of copper /
by Ling Wang.

Description

Main Author

Wang, Ling.

Language(s)

English

Published

2006.

Subjects

University of California, Berkeley. > University of California, Berkeley. / Dept. of Materials Science and Engineering > University of California, Berkeley. / Dept. of Materials Science and Engineering / Dissertations.
Dissertations, Academic > Dissertations, Academic / UCB > Dissertations, Academic / UCB / Materials Science and Engineering

Physical Description

x, 117 leaves : ill. ; 28 cm.

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