Investigation of the chemical and electrochemical phenomena in the chemical mechanical planarization of copper /
by Ling Wang.
APA Citation
Wang, L. (2006). Investigation of the chemical and electrochemical phenomena in the chemical mechanical planarization of copper. .
MLA Citation
Wang, Ling. Investigation of the Chemical And Electrochemical Phenomena In the Chemical Mechanical Planarization of Copper. , 2006.
Warning: These citations may not always be complete (especially for serials).