Investigation of the chemical and electrochemical phenomena in the chemical mechanical planarization of copper

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035	⊔	⊔	‡a(OCoLC)213375190
100	1	⊔	‡aWang, Ling.
245	1	0	‡aInvestigation of the chemical and electrochemical phenomena in the chemical mechanical planarization of copper / ‡cby Ling Wang.
260	⊔	⊔	‡c2006.
300	⊔	⊔	‡ax, 117 leaves : ‡bill. ; ‡c28 cm.
502	⊔	⊔	‡aThesis (Ph. D. in Engineering-Materials Science and Engineering)--University of California, Berkeley, Fall 2006.
504	⊔	⊔	‡aIncludes bibliographical references.
538	⊔	⊔	‡aMode of access: Internet.
610	2	0	‡aUniversity of California, Berkeley. ‡bDept. of Materials Science and Engineering ‡xDissertations.
655	⊔	7	‡aDissertations, Academic ‡zUCB ‡xMaterials Science and Engineering ‡2local
CID	⊔	⊔	‡a100930539
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