Catalog Record: Microelectronic processing laboratory at NBS | HathiTrust Digital Library

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Microelectronic processing laboratory at NBS /
T.F. Leedy, Y.M. Liu.


Main Author: Leedy, T. F.
Related Names: Liu, Y. M. , joint author.
Language(s): English
Published: Washington : .U.S. Dept. of Commerce, National Bureau of Standards : 1978.
Subjects: Microélectronique > Microélectronique / Laboratoires.
Semiconducteurs > Semiconducteurs / Essais.
Electronics laboratories.
Semiconductors > Semiconductors / Testing.
Physical Description: iv, 28 p. : ill. ; 27 cm.
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