Microelectronic processing laboratory at NBS /
T.F. Leedy, Y.M. Liu.

APA Citation

Leedy, T. F., Liu, Y. M. (Yan M.). (1978). Microelectronic processing laboratory at NBS. Washington: .U.S. Dept. of Commerce, National Bureau of Standards .

MLA Citation

Leedy, T. F, and Y. M. (Yan M.) Liu. Microelectronic Processing Laboratory At NBS. Washington: .U.S. Dept. of Commerce, National Bureau of Standards , 1978.

Warning: These citations may not always be complete (especially for serials).