| LDR | 01710cam a2200409 i 4500 | ||
| 001 | 006865781 | ||
| 003 | MiAaHDL | ||
| 005 | 20141009010000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 781106s1978 dcua b f000 0 eng | ||
| 010 | ⊔ | ⊔ | ‡a 78026038 |
| 029 | 1 | ⊔ | ‡aZWZ ‡b018909272 |
| 029 | 1 | ⊔ | ‡aNZ1 ‡b12270630 |
| 029 | 1 | ⊔ | ‡aAU@ ‡b000001307116 |
| 029 | 1 | ⊔ | ‡aNLGGC ‡b113258534 |
| 035 | ⊔ | ⊔ | ‡asdr-uiuc339191 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990068657810106381 |
| 035 | ⊔ | ⊔ | ‡asdr-ucr991025204839704706 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)4494598 |
| 040 | ⊔ | ⊔ | ‡aDLC ‡cDLC ‡dOCLCQ ‡dBTCTA ‡dOCLCG ‡dZWZ |
| 049 | ⊔ | ⊔ | ‡aUIUU |
| 050 | 0 | 0 | ‡aQC100 ‡b.U57 no. 400-53 ‡aTK7871.85 |
| 082 | 0 | 0 | ‡a602.1 s ‡a621.381/7/028 |
| 086 | 0 | ⊔ | ‡aC 13.10:400-35 |
| 100 | 1 | ⊔ | ‡aLeedy, T. F. |
| 245 | 1 | 0 | ‡aMicroelectronic processing laboratory at NBS / ‡cT.F. Leedy, Y.M. Liu. |
| 260 | ⊔ | ⊔ | ‡aWashington : ‡b.U.S. Dept. of Commerce, National Bureau of Standards : ‡bfor sale by the Supt. of Docs., U.S. Govt. Print. Off., ‡c1978. |
| 300 | ⊔ | ⊔ | ‡aiv, 28 p. : ‡bill. ; ‡c27 cm. |
| 490 | ⊔ | 0 | ‡aSemiconductor measurement technology |
| 490 | 0 | ⊔ | ‡aNational Bureau of Standards special publication ; 400-53 |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 7 | ‡aMicroélectronique ‡xLaboratoires. ‡2ram |
| 650 | ⊔ | 7 | ‡aSemiconducteurs ‡xEssais. ‡2ram |
| 650 | ⊔ | 0 | ‡aMicroelectronics. |
| 650 | ⊔ | 0 | ‡aElectronics laboratories. |
| 650 | ⊔ | 0 | ‡aTransistors. |
| 650 | ⊔ | 0 | ‡aSemiconductors ‡xTesting. |
| 700 | 1 | ⊔ | ‡aLiu, Y. M. ‡q(Yan M.), ‡ejoint author. |
| 776 | 0 | 8 | ‡iOnline version: ‡aLeedy, T. F. ‡tMicroelectronic processing laboratory at NBS. ‡dWashington : .U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1978 ‡w(OCoLC)630960572 |
| CID | ⊔ | ⊔ | ‡a006865781 |
| DAT | 0 | ⊔ | ‡a20100730154244.0 ‡b20141009010000.0 |
| DAT | 1 | ⊔ | ‡a20141112162027.0 ‡b2025-01-01T18:45:32Z |
| DAT | 2 | ⊔ | ‡a2025-01-01T18:30:02Z |
| CAT | ⊔ | ⊔ | ‡aSDR-UIUC ‡dUNKNOWN ‡lloader.pl-003-020 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-uiuc339191 ‡auiug ‡bSDR ‡cUIUC ‡puiug.30112104076663 ‡sUIU ‡zno.400:53 ‡1339191 |
| 974 | ⊔ | ⊔ | ‡bUIU ‡cUIUC ‡d20250101 ‡sgoogle ‡uuiug.30112104076663 ‡zno.400:53 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cGWLA ‡d20250109 ‡sgoogle ‡umdp.39015077586595 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |
| 974 | ⊔ | ⊔ | ‡bUC ‡cUCR ‡d20240712 ‡sgoogle ‡uuc1.31210024780205 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |