Advanced metallization and interconnect systems for ULSI applications in 1996 :
proceedings of the conference held October 1-3, 1996, in Boston, Massachusetts /
sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. ; a parallel session of the conference was held from October 23-24, 1996, in Tokyo, Japan ; editors, Robert Havemann ... [et al.].

Description

Related Names

Havemann, Robert (Robert H.)
University of California, Berkeley. Continuing Education in Engineering.

Language(s)

English

Published

Pittsburgh, Pa. : Materials Research Society, c1997.

Subjects

Titanium nitride > Titanium nitride / Congresses.
Dielectrics > Dielectrics / Congresses.
Electrochemical metallizing > Electrochemical metallizing / Congresses.
Vapor-plating > Vapor-plating / Congresses.
Integrated circuits > Integrated circuits / Ultra large scale integration > Integrated circuits / Ultra large scale integration / Design and construction > Integrated circuits / Ultra large scale integration / Design and construction / Congresses.

Physical Description

xvi, 608 p. : ill. ; 24 cm.

ISBN

1558993851

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