Advanced metallization for ULSI applications :
proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan /
sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors, Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.].

Description

Related Names

Ohdomari, I. (Iwao)
Joshi, Rajiv V.
Rana, Virendra Vir Singh.
University of California, Berkeley. Continuing Education in Engineering.

Language(s)

English

Published

Pittsburgh : Materials Research Society. c1992.

Subjects

Electrochemical metallizing > Electrochemical metallizing / Congresses.
Vapor-plating > Vapor-plating / Congresses.
Tungsten > Tungsten / Congresses.
Integrated circuits > Integrated circuits / Very large scale integration > Integrated circuits / Very large scale integration / Materials > Integrated circuits / Very large scale integration / Materials / Congresses.

Note

"Formerly Workshop on Tungsten and Other Advanced Metals for ULSI Applications."

Physical Description

xv, 580 p. : ill. ; 24 cm.

ISBN

1558991522

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