Material characterization techniques for integrated circuit processing :
[a short course] March 19-21, 1984, San Mateo, California /
Continuing Education for Engineering, University Extension, and the College of Engineering, University of California, Berkeley.

Description

Related Names

University of California, Berkeley. College of Engineering.
University of California, Berkeley. Continuing Education in Engineering.

Language(s)

English

Published

Berkeley, Calif. : Continuing Education in Engineering, University Extension, [1984]

Subjects

Integrated circuits.
Electron spectroscopy.
Spectroscopie électronique.
Circuits intégrés.
Electron spectroscopy.
Integrated circuits.

Physical Description

1 volume (various pagings) : illustrations ; 28 cm

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