Annual Symposium on Photomask Technology :
proceedings.

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New Title: Annual Symposium on Photomask Technology and Management.
Meeting Name: Symposium on Photomask Technology.
Related Names: Society of Photo-optical Instrumentation Engineers.
BACUS (Technical group)
Language(s): English
Published: Bellingham, Wash. : SPIE--the International Society for Optical Engineering, -1991.
Subjects: Microlithography > Microlithography / Congresses.
Integrated circuits > Integrated circuits / Masks > Integrated circuits / Masks / Congresses.
Note: Description based on: 11th (1991).
Sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask Technology, -1991.
Physical Description: v. : ill. ; 28 cm.
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Limited (search only) v.11 1991	University of Michigan

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