Annual Symposium on Photomask Technology : proceedings

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111 2 ‡aSymposium on Photomask Technology. ‡0http://id.loc.gov/authorities/names/nr00012683 ‡1http://id.loc.gov/rwo/agents/nr00012683
245 1 0 ‡aAnnual Symposium on Photomask Technology : ‡bproceedings.
246 1 0 ‡aPhotomask technology
246 1 0 ‡aProceedings
260 ‡aBellingham, Wash. : ‡bSPIE--the International Society for Optical Engineering, ‡c-1991.
300 ‡av. : ‡bill. ; ‡c28 cm.
310 ‡aAnnual
336 ‡atext ‡btxt ‡2rdacontent
337 ‡acomputer ‡bc ‡2rdamedia
338 ‡aonline resource ‡bcr ‡2rdacarrier
362 1 ‡aCeased with: 11th (1991).
490 0 ‡a-1991: Proceedings / SPIE
500 ‡aDescription based on: 11th (1991).
538 ‡aMode of access: Internet.
550 ‡aSponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask Technology, -1991.
650 0 ‡aMicrolithography ‡vCongresses. ‡0http://id.loc.gov/authorities/subjects/sh2008107753
650 0 ‡aIntegrated circuits ‡xMasks ‡vCongresses. ‡0http://id.loc.gov/authorities/subjects/sh2008104740
710 2 ‡aSociety of Photo-Optical Instrumentation Engineers. ‡0http://id.loc.gov/authorities/names/n78088934 ‡1http://id.loc.gov/rwo/agents/n78088934
710 2 ‡aBACUS (Technical group) ‡0http://id.loc.gov/authorities/names/n92089299 ‡1http://id.loc.gov/rwo/agents/n92089299
730 0 ‡aSPIE digital library. ‡0http://id.loc.gov/authorities/names/no2006030688 ‡1http://id.loc.gov/rwo/agents/no2006030688 ‡1http://viaf.org/viaf/181712398
785 0 0 ‡aSymposium on Photomask Technology and Management. ‡tAnnual Symposium on Photomask Technology and Management.
899 ‡a39015025206536 ‡cv.11 1991
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