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Annual Symposium on Photomask Technology :
proceedings.

APA Citation

Symposium on Photomask Technology., Society of Photo-Optical Instrumentation Engineers., BACUS (Technical group). (1991). Annual Symposium on Photomask Technology: proceedings. Bellingham, Wash.: SPIE--the International Society for Optical Engineering.

MLA Citation

Symposium on Photomask Technology, Society of Photo-Optical Instrumentation Engineers, and BACUS (Technical group). Annual Symposium On Photomask Technology: Proceedings. Bellingham, Wash.: SPIE--the International Society for Optical Engineering, 1991.

Warning: These citations may not always be complete (especially for serials).