Lasers in microelectronic manufacturing :
10-11 September 1991, San Jose, California /
Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Related Names: Braren, Bodil.
Society of Photo-optical Instrumentation Engineers.
Language(s): English
Published: Bellingham, Wash. : SPIE, c1991.
Subjects: Lasers > Lasers / Industrial applications > Lasers / Industrial applications / Congresses.
Microelectronics > Microelectronics / Congresses.
Physical Description: vii, 240 p. : ill. ; 28 cm.
ISBN: 0819407291
Locate a Print Version: Find in a library

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