Lasers in microelectronic manufacturing :
10-11 September 1991, San Jose, California /
Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
APA Citation
Braren, B., Society of Photo-optical Instrumentation Engineers. (1991). Lasers in microelectronic manufacturing: 10-11 September 1991, San Jose, California. Bellingham, Wash.: SPIE.
MLA Citation
Braren, Bodil, and Society of Photo-optical Instrumentation Engineers. Lasers In Microelectronic Manufacturing: 10-11 September 1991, San Jose, California. Bellingham, Wash.: SPIE, 1991.
Warning: These citations may not always be complete (especially for serials).