| LDR | 01187nam a2200277 a 4500 | ||
| 001 | 002565283 | ||
| 003 | MiAaHDL | ||
| 005 | 20210817000000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 920928s1991 waua b 101 0 eng | ||
| 010 | ⊔ | ⊔ | ‡a91067489 |
| 020 | ⊔ | ⊔ | ‡a0819407291 ‡q(pbk.) |
| 035 | ⊔ | ⊔ | ‡a(MiU)990025652830106381 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990025652830106381 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)25381852 |
| 035 | ⊔ | ⊔ | ‡z(MiU)Aleph002565283 |
| 040 | ⊔ | ⊔ | ‡aDLC ‡cDLC ‡dEYM |
| 050 | 0 | 0 | ‡aTK7874 ‡b.L316 1991 |
| 082 | 0 | 0 | ‡a621.381 ‡220 |
| 245 | 0 | 0 | ‡aLasers in microelectronic manufacturing : ‡b10-11 September 1991, San Jose, California / ‡cBodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering. |
| 260 | ⊔ | ⊔ | ‡aBellingham, Wash. : ‡bSPIE, ‡cc1991. |
| 300 | ⊔ | ⊔ | ‡avii, 240 p. : ‡bill. ; ‡c28 cm. |
| 490 | 0 | ⊔ | ‡aProceedings / SPIE--the International Society for Optical Engineering ; ‡vv. 1598 |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references and index. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 0 | ‡aLasers ‡xIndustrial applications ‡xCongresses. |
| 650 | ⊔ | 0 | ‡aMicroelectronics ‡vCongresses. |
| 700 | 1 | ⊔ | ‡aBraren, Bodil. |
| 710 | 2 | ⊔ | ‡aSociety of Photo-optical Instrumentation Engineers. |
| CID | ⊔ | ⊔ | ‡a002565283 |
| DAT | 0 | ⊔ | ‡a19920928000000.0 ‡b20210817000000.0 |
| DAT | 1 | ⊔ | ‡a20210915090706.0 ‡b2023-06-17T17:42:56Z |
| CAT | ⊔ | ⊔ | ‡aSDR-MIU ‡dALMA ‡lprepare.pl-004-008 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-miu.990025652830106381 ‡aMiU ‡bSDR ‡cMIU ‡pmdp.39015025181028 ‡sMIU ‡1990025652830106381 |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cMIU ‡d20230617 ‡sgoogle ‡umdp.39015025181028 ‡y1991 ‡ric ‡qbib ‡tUS bib date1 >= 1929 |