Photons and low energy particles in surface processing :
symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. /
editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.

Description

Related Names

Pang, Stella W.
Brannon, James H.
Ashby, Carol Iris Hill, 1953-

Language(s)

English

Published

Pittsburgh, Pa. : Materials Research Society, c1992.

Subjects

Plasma-enhanced chemical vapor deposition > Plasma-enhanced chemical vapor deposition / Congresses.
Photon beams > Photon beams / Industrial applications > Photon beams / Industrial applications / Congresses.
Lasers > Lasers / Industrial applications > Lasers / Industrial applications / Congresses.
Plasma etching > Plasma etching / Congresses.
Surfaces (Technology) > Surfaces (Technology) / Congresses.

Physical Description

xv, 552 p. : ill. ; 24 cm.

ISBN

1558991301

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