Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A.

LDR 01537nam a2200373 a 4500
001 002545532
003 MiAaHDL
005 20240704000000.0
006 m d
007 cr bn ---auaua
008 920626s1992 paua b 101 0 eng
010 ‡a92007821
020 ‡a1558991301
035 ‡a(MiU)990025455320106381
035 ‡asdr-miu.990025455320106381
035 ‡z(MiU)MIU01000000000000002545532-goog
035 ‡a(OCoLC)25412003
035 ‡z(MiU)Aleph002545532
040 ‡aDLC ‡cDLC ‡dEYM
050 0 0 ‡aTA418.7 ‡b.P46 1992
082 0 0 ‡a620/.44 ‡220
245 0 0 ‡aPhotons and low energy particles in surface processing : ‡bsymposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / ‡ceditors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.
260 ‡aPittsburgh, Pa. : ‡bMaterials Research Society, ‡cc1992.
300 ‡axv, 552 p. : ‡bill. ; ‡c24 cm.
490 0 ‡aMaterials Research Society symposium proceedings, ‡x0272-9172 ; ‡vv. 236
504 ‡aIncludes bibliographical references and indexes.
538 ‡aMode of access: Internet.
650 0 ‡aPlasma-enhanced chemical vapor deposition ‡vCongresses.
650 0 ‡aPhoton beams ‡xIndustrial applications ‡vCongresses.
650 0 ‡aLasers ‡xIndustrial applications ‡vCongresses.
650 0 ‡aPlasma etching ‡vCongresses.
650 0 ‡aSurfaces (Technology) ‡vCongresses.
700 1 ‡aPang, Stella W.
700 1 ‡aBrannon, James H.
700 1 ‡aAshby, Carol Iris Hill, ‡d1953-
730 0 ‡aMRS proceedings.
899 ‡a39015025274419
CID ‡a002545532
DAT 0 ‡a20240603185659.0 ‡b20240704000000.0
DAT 1 ‡a20240704120241.0 ‡b2024-07-05T07:40:29Z
DAT 2 ‡a2023-08-14T17:30:02Z
CAT ‡aSDR-MIU ‡cmiu ‡dALMA ‡lprepare.pl-004-008
FMT ‡aBK
HOL ‡0sdr-miu.990025455320106381 ‡aMiU ‡bSDR ‡cMIU ‡f002545532 ‡pmdp.39015025274419 ‡sMIU ‡1990025455320106381
974 ‡bMIU ‡cMIU ‡d20240705 ‡sgoogle ‡umdp.39015025274419 ‡y1992 ‡ric ‡qbib ‡tUS bib date1 >= 1929