Deposition and growth :
limits for microelectronics /
editor: G.W. Rubloff.

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Related Names
Rubloff, G. W.
American Vacuum Society.
American Institute of Physics.
Language(s)
English
Published
New York : American Institute of Physics, 1988.
Subjects
Thin films > Congresses.
Microelectronics > Congresses.
Note
Topical conference held in Anaheim, California, on November 3-5, 1987, in conjunction with the American Vacuum Society's 34th National Symposium.
Physical Description
388 p. : ill. ; 25 cm.
ISBN
0883183676
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