Deposition and growth :
limits for microelectronics /
editor: G.W. Rubloff.

APA Citation

Rubloff, G. W., American Vacuum Society., American Institute of Physics. (1988). Deposition and growth: limits for microelectronics. New York: American Institute of Physics.

MLA Citation

Rubloff, G. W, American Vacuum Society, and American Institute of Physics. Deposition And Growth: Limits for Microelectronics. New York: American Institute of Physics, 1988.

Warning: These citations may not always be complete (especially for serials).