Laser processing of thin films and microstructures :
oxidation, deposition, and etching of insulators /
Ian W. Boyd.

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Main Author
Boyd, Ian W., 1958-
Language(s)
English
Published
Berlin ; Springer-Verlag, c1987.
Subjects
Lasers > Industrial applications.
Note
Includes index.
Physical Description
viii, 320 p. : 77 ill. ; 24 cm.
ISBN
0387179518
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Limited (search only)   University of Michigan