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881103s1987 wb a b 00110 eng |
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‡a87020660
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‡aTA1677
‡b.B69 1987
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‡a621.36/6
‡219
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‡aBoyd, Ian W.,
‡d1958-
|
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0 |
‡aLaser processing of thin films and microstructures :
‡boxidation, deposition, and etching of insulators /
‡cIan W. Boyd.
|
260 |
⊔ |
⊔ |
‡aBerlin ;
‡aNew York :
‡bSpringer-Verlag,
‡cc1987.
|
300 |
⊔ |
⊔ |
‡aviii, 320 p. :
‡b77 ill. ;
‡c24 cm.
|
490 |
0 |
⊔ |
‡aSpringer series in materials science ;
‡v3
|
500 |
⊔ |
⊔ |
‡aIncludes index.
|
504 |
⊔ |
⊔ |
‡aBibliography: p. 287-313.
|
538 |
⊔ |
⊔ |
‡aMode of access: Internet.
|
650 |
⊔ |
0 |
‡aLasers
‡xIndustrial applications.
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‡a000903999
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‡tnon-US bib date1 >= 1929
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