Laser processing of thin films and microstructures :
oxidation, deposition, and etching of insulators /
Ian W. Boyd.

APA Citation

Boyd, I. W. (1987). Laser processing of thin films and microstructures: oxidation, deposition, and etching of insulators. Berlin: Springer-Verlag.

MLA Citation

Boyd, Ian W., 1958-. Laser Processing of Thin Films And Microstructures: Oxidation, Deposition, And Etching of Insulators. Berlin: Springer-Verlag, 1987.

Warning: These citations may not always be complete (especially for serials).