Advanced semiconductor processing and characterization of electronic and optical materials :
January 24-25, 1984, Los Angeles, California /
Devendra K. Sadana, Carl M. Lampert, chairmen/editors ; cooperating organizations, American Vacuum Society, Electronic Materials and Process Division
Description
- Language(s)
-
English
- Published
-
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1984
- Physical Description
-
vi, 147 p. :
ill. ;
28 cm
- ISBN
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0892524987 (pbk.)
Viewability