ARPA/NBS workshop IV :
surface analysis for silicon devices /
[edited by] A. George Lieberman.

Description

Related Names

Lieberman, A. George (Alfred George), 1937-
United States. National Bureau of Standards.

Language(s)

English

Published

Washington : U.S. Dept. of Commerce, National Bureau of Standards : 1976.

Subjects

Surfaces (technologie) > Surfaces (technologie) / Analyse > Surfaces (technologie) / Analyse / Congrès.
Silicium > Silicium / Surfaces > Silicium / Surfaces / Congrès.
Semiconducteurs > Semiconducteurs / Essais > Semiconducteurs / Essais / Congrès.
Spectrum analysis > Spectrum analysis / Congresses.
Surfaces (Technology) > Surfaces (Technology) / Analysis > Surfaces (Technology) / Analysis / Congresses.
Silicon > Silicon / Testing > Silicon / Testing / Congresses.
Semiconductors > Semiconductors / Testing > Semiconductors / Testing / Congresses.

Note

"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."

Physical Description

vii, 239 p. : ill. ; 27 cm.

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