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| 049 | ⊔ | ⊔ | ‡aUIUU |
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| 082 | 0 | 0 | ‡a602/.1 s ‡a621.3815/2 |
| 086 | 0 | ⊔ | ‡aC 13.10:400-23. |
| 245 | 0 | 0 | ‡aARPA/NBS workshop IV : ‡bsurface analysis for silicon devices / ‡c[edited by] A. George Lieberman. |
| 260 | ⊔ | ⊔ | ‡aWashington : ‡bU.S. Dept. of Commerce, National Bureau of Standards : ‡b[For sale by the Supt. of Docs., Govt. Print. Off.], ‡c1976. |
| 300 | ⊔ | ⊔ | ‡avii, 239 p. : ‡bill. ; ‡c27 cm. |
| 490 | ⊔ | 0 | ‡aSemiconductor measurement technology |
| 490 | 0 | ⊔ | ‡aNBS special publication ; 400-23 |
| 500 | ⊔ | ⊔ | ‡a"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975." |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references and index. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 7 | ‡aSurfaces (technologie) ‡xAnalyse ‡xCongrès. ‡2ram |
| 650 | ⊔ | 7 | ‡aSilicium ‡xSurfaces ‡xCongrès. ‡2ram |
| 650 | ⊔ | 7 | ‡aSemiconducteurs ‡xEssais ‡xCongrès. ‡2ram |
| 650 | ⊔ | 0 | ‡aSpectrum analysis ‡vCongresses. |
| 650 | ⊔ | 0 | ‡aSurfaces (Technology) ‡xAnalysis ‡vCongresses. |
| 650 | ⊔ | 0 | ‡aSilicon ‡xTesting ‡vCongresses. |
| 650 | ⊔ | 0 | ‡aSemiconductors ‡xTesting ‡vCongresses. |
| 700 | 1 | ⊔ | ‡aLieberman, A. George ‡q(Alfred George), ‡d1937- |
| 710 | 1 | ⊔ | ‡aUnited States. ‡bNational Bureau of Standards. |
| 776 | 0 | 8 | ‡iOnline version: ‡tARPA/NBS workshop IV. ‡dWashington : U.S. Dept. of Commerce, National Bureau of Standards : [For sale by the Supt. of Docs., Govt. Print. Off.], 1976 ‡w(OCoLC)607852405 |
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