Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics /
A. Christou.

Description

Tools

Cite this Export citation file
Main Author
Christou, A.
Related Names
United States. National Bureau of Standards.
Language(s)
English
Published
Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1978.
Subjects
Semiconductor wafers > Testing.
Probes (Electronic instruments)
Physical Description
v, 32 p. : ill. ; 26 cm.
Locate a Print Version
Find in a library

Viewability

Item Link Original Source
Full view   Technical Report Archive & Image Library
Full view   University of California
Full view   400-30 University of Illinois at Urbana-Champaign